Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Benior Chen"'
Autor:
Alexander Kalnitsky, Huang Shih-Fen, Benior Chen, Hu Fan, Terrence Yu, Sean Cheng, Leo Tsai, Lin Anderson, Victor Shih, Vincent Teng, Yeur-Luen Tu, Lin You-Ru, Huang Fu-Chun, Yi-Heng Tsai, Ching-Hui Lin, Julian Lee, Lee-Chuan Tseng, Chen Yen-Wen, Liao Yan-Jie, Ching-Hua Chiu, Kelvin Tai, Chih-Ming Chen, Chang Kai-Fung
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
This work presents the piezoelectric process technology developed in a high volume foundry for emerging MEMS applications. Innovative reliability enhancement techniques for piezoelectric devices are demonstrated to significantly boost (1) dielectric
Autor:
Tien-Kan Chung, Robert Chin-Fu Tsai, Nick Y. M. Shen, Sean Cheng, Emerson Cheng, Bruce C. S. Chou, Benior Chen, Kuei-Sung Chang, Yi-Shao Liu, Chung-Hsien Lin, CM Liu, Hsiao Chin Tuan, Alex Kalnitsky
Publikováno v:
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process “phase-in” and internally developed “platform” are discussed. The latter is a TSMC-MEMS pla