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Autor:
Bengashier, Munira, Grech, Ivan, Casha, Owen, Farrugia, Russell, Portelli, Barnaby, 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)
This paper presents finite element simulation and experimental results for a 60 MHz contour-mode piezoelectric MEMS resonator. The device which operates at the 5 th order lateral bulk modal frequency was fabricated using the PiezoMUMPs MPW process wh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4389ef0f503ad3b7e25255b0d7a823b9
https://www.um.edu.mt/library/oar/handle/123456789/59287
https://www.um.edu.mt/library/oar/handle/123456789/59287
