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Publikováno v:
The International Journal of Advanced Manufacturing Technology. 68:425-433
Wafer-handling robots are used to transfer wafers in semiconductor manufacturing. Typically, a pick–measure–place method is used to transfer wafers accurately between stations. The measurement step is performed using an aligner, which is time-con
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4d38179e1b7bfc35c3f85fc6ba2b2719
https://doi.org/10.1007/s00170-013-4740-4
https://doi.org/10.1007/s00170-013-4740-4
