Process integration of an interlevel dielectric (ILDO)...

Autor: Paulsen, Ronald E., Kyono, Carl S., Yun Wang, Klein, Kevin M., I.-S. Lim, Tinkler, S., Bellamak, B., Odle, David W., Zhixu Zhou, Dahl, P., Giovanetto, Mark, Makwana, Jitendra, Patel, S., Reno, Chris, Lenahan, Patrick M., Billman, Curt A.

Publikováno v: IEEE Transactions on Electron Devices; Mar98, Vol. 45 Issue 3, p655, 10p, 2 Black and White Photographs, 2 Charts, 6 Graphs