Direct liquid injection chemical vapor deposition of ZrO2films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel

Autor: Beer, Sebastian M.J., Samelor, Diane, Abdel Aal, Alsayed, Etzkorn, Johannes, Rogalla, Detlef, Turgambaeva, Asiya E., Esvan, Jerome, Kostka, Aleksander, Vahlas, Constantin, Devi, Anjana

Publikováno v: Journal of Materials Research and Technology; July-August 2021, Vol. 13 Issue: 1 p1599-1614, 16p