Multiscale modelling framework for the fracture of thin brittle polycrystalline films: application to polysilicon.

Autor: Mulay, Shantanu¹ ssmulay@ae.iitm.ac.in, Becker, Gauthier², Vayrette, Renaud³, Raskin, Jean-Pierre³, Pardoen, Thomas⁴, Galceran, Montserrat, Godet, Stéphane⁵, Noels, Ludovic¹ L.Noels@ulg.ac.be

Publikováno v: Computational Mechanics. Jan2015, Vol. 55 Issue 1, p73-91. 19p.

The fracture studies of polycrystalline silicon based MEMS.

Autor: Mulay, Shantanu S., Becker, Gauthier, Vayrette, Renaud, Raskin, Jean-Pierre, Pardoen, Thomas, Galceran, Montserrat, Godet, Stephane, Noels, Ludovic

Publikováno v: 2013 14th International Conference on Thermal, Mechanical & Multi-Physics Simulation & Experiments in Microelectronics & Microsystems (EuroSimE); 2013, p1-9, 9p