Zobrazeno 1 - 1
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pro vyhledávání: '"Bastiaan Onne Fagginger Auer"'
Autor:
Maryana Escalante Marun, Steven Welch, Frank Staals, Stuart Young, Stefan Geerte Kruijswijk, Stefan Petra, Bart Segers, Arie Jeffrey Den Boef, Bastiaan Onne Fagginger Auer, Wei Guo, Hugo Augustinus Joseph Cramer, Paul Christiaan Hinnen, Christian Marinus Leewis, Henk-Jan H. Smilde, Baukje Wisse
Publikováno v:
SPIE Proceedings.
The continuing trend of shrinking dimension and the related specifications requires tightening of control loops. To support the tighter control loops, the metrology sampling plans will require increasing sampling density and frequency. This study sho