Deep multilevel wet etching of fused silica glass microstructures in BOE solution.

Autor: Konstantinova TG; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Andronic MM; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Baklykov DA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Stukalova VE; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Ezenkova DA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Zikiy EV; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Bashinova MV; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Solovev AA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Lotkov ES; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Ryzhikov IA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Rodionov IA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia. irodionov@bmstu.ru.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia. irodionov@bmstu.ru.

Publikováno v: Scientific reports [Sci Rep] 2023 Mar 30; Vol. 13 (1), pp. 5228. Date of Electronic Publication: 2023 Mar 30.