Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Baokai Feng"'
Publikováno v:
Sensors, Vol 19, Iss 20, p 4587 (2019)
A low-cost miniature homodyne interferometer (MHI) with self-wavelength correction and self-wavelength stabilization is proposed for long-stroke micro/nano positioning stage metrology. In this interferometer, the displacement measurement is based on
Externí odkaz:
https://doaj.org/article/6f05cbefde0d49869c028b275b046164
Publikováno v:
Sensors, Vol 19, Iss 20, p 4587 (2019)
Sensors
Volume 19
Issue 20
Sensors (Basel, Switzerland)
Sensors
Volume 19
Issue 20
Sensors (Basel, Switzerland)
A low-cost miniature homodyne interferometer (MHI) with self-wavelength correction and self-wavelength stabilization is proposed for long-stroke micro/nano positioning stage metrology. In this interferometer, the displacement measurement is based on
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8a6b81f76ab552e350d2c21bb3a7691e
https://www.mdpi.com/1424-8220/19/20/4587
https://www.mdpi.com/1424-8220/19/20/4587
Publikováno v:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::89a9137afb0e2308390b5d61a4a98a98
https://doi.org/10.1117/12.2509514
https://doi.org/10.1117/12.2509514
Publikováno v:
Proceedings of SPIE; 11/14/2019, Vol. 11343, p1-6, 6p
Publikováno v:
Proceedings of SPIE; 4/26/2019, Vol. 11053, p1-6, 6p