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Publikováno v:
Optical Engineering. 57:1
A two-dimensional (2-D) shearing interferometer based on an amplitude chessboard grating was designed to measure the wavefront aberration of a high numerical-aperture (NA) objective. Chessboard gratings offer better diffraction efficiencies and fewer
Publikováno v:
SPIE Proceedings.
Lateral shearing interferometry is an attractive technique to measure the wavefront aberration of high numerical aperture optical systems, of which using two-dimensional grating can divide and shear the wavefront in two-dimension simultaneously. A tw