Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Bao Dian Fan"'
Publikováno v:
Materials Science Forum. 833:122-126
A YAG continue-wave laser has been used to refine the surface of silicon wafers in this study. During laser scanning, the irradiated region of the surface of the wafer experienced melting and subsequent recrystallization, which results in a redistrib
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e8054a35b736057843afb143f71f797
https://doi.org/10.4028/www.scientific.net/msf.833.122
https://doi.org/10.4028/www.scientific.net/msf.833.122
Publikováno v:
Materials Science Forum. 833:117-121
The direct removal of metal impurity from Si wafer by continuous-wave (CW) laser irradiation has been studied. The wafer was irradiated by linear (Nd:YAG) CW laser with a wavelength of 1064nm. The irradiated region of the wafer experienced melting an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56ab54daf941652124d67730ef38bef6
https://doi.org/10.4028/www.scientific.net/msf.833.117
https://doi.org/10.4028/www.scientific.net/msf.833.117
Publikováno v:
Chinese Physics Letters; Feb2016, Vol. 33 Issue 2, p1-1, 1p