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pro vyhledávání: '"Bai, Pengyu"'
Autor:
Bai, Pengyu1,2 (AUTHOR), Yang, Shuhua1 (AUTHOR) yangshuhua78@163.com, Yan, Yalin3,4 (AUTHOR), Wang, Dongliang2,3,4 (AUTHOR) yangshuhua78@163.com, Ma, Yanwei2,3,4 (AUTHOR)
Publikováno v:
Materials (1996-1944). Nov2024, Vol. 17 Issue 22, p5476. 25p.
Akademický článek
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Publikováno v:
Jixie chuandong, Vol 44, Pp 80-87 (2020)
In order to study the platform of orthogonal three-degree-of-freedom translational parallel mechanism, the platform configuration of the parallel mechanism is designed, and the corrected Kutzabach-Grubler freedom formula is used to verify that th
Externí odkaz:
https://doaj.org/article/16350caabb834bf3831da96ed82b46bb
Publikováno v:
2020 3rd World Conference on Mechanical Engineering and Intelligent Manufacturing (WCMEIM).
Aiming at the problems of low cleaning efficiency and poor cleaning effect of the current wet cleaning device for wafers, a multi-chip rotary cleaning equipment was designed, which used cleaning manipulator instead of human hands to achieve automatic