Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Bahram Azizolla Ganji"'
Publikováno v:
Microsystem Technologies. 24:1061-1070
In this paper, a novel micro electro mechanical systems (MEMS) capacitive microphone is designed and modeled using SOI technology. We present static linear spring constant analysis of the supported plate by frog arms. Then, we develop equations to de
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc2e436da91d4709f7cc12731c9700bf
https://doi.org/10.1007/s00542-017-3461-2
https://doi.org/10.1007/s00542-017-3461-2
Publikováno v:
Microsystem Technologies. 22:2921-2929
This paper presents the design, analysis, modeling and simulation of a novel RF MEMS series switches with low actuation voltage. A mechanical modeling is presented to describe the behavior of the series switch. The switch is designed with special mec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::193cadafcf87d7b7d260e3474f5df5df
https://doi.org/10.1007/s00542-015-2683-4
https://doi.org/10.1007/s00542-015-2683-4