Formation of a resonant microcavity in hydrogen ion-implanted silicon-on-insulator structures.

Autor: Tyschenko, I. E., Talochkin, A. B., Bagaev, E. M., Cherkov, A. G., Popov, V. P., Misiuk, A., Yankov, R. A.

Publikováno v: Journal of Applied Physics; Oct2007, Vol. 102 Issue 7, p074312, 10p, 1 Black and White Photograph, 1 Diagram, 10 Graphs