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Thermal Conductivity of β-Phase Ga 2 O 3 and (Al x Ga 1- x ) 2 O 3 Heteroepitaxial Thin Films.

Autor: Song Y; Department of Mechanical Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Ranga P; Department of Electrical and Computer Engineering, University of Utah, Salt Lake City, Utah 84112, United States., Zhang Y; Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455, United States., Feng Z; Department of Electrical and Computer Engineering, The Ohio State University, Columbus, Ohio 43210, United States., Huang HL; Department of Materials Science and Engineering, The Ohio State University, Columbus, Ohio 43210, United States., Santia MD; Sensors Directorate, Air Force Research Laboratory, Wright-Patterson Air Force Base, Ohio 45433, United States., Badescu SC; Sensors Directorate, Air Force Research Laboratory, Wright-Patterson Air Force Base, Ohio 45433, United States., Gonzalez-Valle CU; Department of Mechanical Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Perez C; Department of Mechanical Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Ferri K; Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Lavelle RM; Electronic Materials and Devices Department, Applied Research Laboratory, University Park, Pennsylvania 16802, United States., Snyder DW; Electronic Materials and Devices Department, Applied Research Laboratory, University Park, Pennsylvania 16802, United States., Klein BA; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Deitz J; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Baca AG; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Maria JP; Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Ramos-Alvarado B; Department of Mechanical Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Hwang J; Department of Materials Science and Engineering, The Ohio State University, Columbus, Ohio 43210, United States., Zhao H; Department of Electrical and Computer Engineering, The Ohio State University, Columbus, Ohio 43210, United States.; Department of Materials Science and Engineering, The Ohio State University, Columbus, Ohio 43210, United States., Wang X; Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455, United States., Krishnamoorthy S; Department of Electrical and Computer Engineering, University of Utah, Salt Lake City, Utah 84112, United States., Foley BM; Department of Mechanical Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Choi S; Department of Mechanical Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States.

Publikováno v: ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2021 Aug 18; Vol. 13 (32), pp. 38477-38490. Date of Electronic Publication: 2021 Aug 09.