Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Bacuita, Terence"'
Autor:
Roberts, Jeanette, Bacuita, Terence, Bristol, Robert L., Cao, Heidi, Chandhok, Manish, Lee, Sang H., Leeson, Michael, Liang, Ted, Panning, Eric, Rice, Bryan J., Shah, Uday, Shell, Melissa, Yueh, Wang, Zhang, Guojing
Publikováno v:
In Microelectronic Engineering 2006 83(4):672-675
Autor:
Roberts, Jeanette M., Bacuita, Terence, Bristol, Robert L., Cao, Heidi B., Chandhok, Manish, Lee, Sang H., Panning, Eric M., Shell, Melissa, Zhang, Guojing, Rice, Bryan J.
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p64-77, 14p
Autor:
Cao, Heidi B., Yueh, Wang, Rice, Bryan J., Roberts, Jeanette, Bacuita, Terence, Chandhok, Manish
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p757-764, 8p
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2004, Vol. 22 Issue 6, p2966-2969, 4p
EUV lithography for 22nm half pitch and beyond: exploring resolution, LWR, and sensitivity tradeoffs
Autor:
Putna, E. Steve, Younkin, Todd R., Leeson, Michael, Caudillo, Roman, Bacuita, Terence, Shah, Uday, Chandhok, Manish
Publikováno v:
Proceedings of SPIE; March 2011, Vol. 7969 Issue: 1 p79692K-79692K-9, 717238p