Výsledky vyhledávání - "Babusha Singh"

Optimization of platinum thin film as a bottom electrode for aluminum nitride thin films using Plackett-Burman statistical approach

Autor: Rudra Pratap, Saurabh A. Chandorkar, Babusha Singh, Shubham Jadhav

Publikováno v: 2018 4th IEEE International Conference on Emerging Electronics (ICEE).

In this work, Plackett-Burman design is used to optimize platinum thin film sputtering parameters. The effect of different deposition parameters on Pt (111) rocking curve FWHM, residual stress and roughness of Pt film was studied. These substrate par

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::64452fc9edd1d098a9bc920a9c887fb8
https://doi.org/10.1109/icee44586.2018.8937951

Zobrazit plný text záznamu

Vyhledávací nástroje:

Upřesnit hledání