Wafer level packaging technology for silicon resonators

Autor: Baborowski, J., Pezous, A., Spinola Durante, G., Jose James, R., Ziltener, R., Muller, C., Dubois, M.-A.

Publikováno v: In Procedia Chemistry September 2009 1(1):1535-1538

Imaging by time-of-flight secondary ion mass spectrometry of plasma patterned metal and oxide thin films

Autor: Coullerez, G., Baborowski, J., Viornery, C., Chevolot, Y., Xanthopoulos, N., Ledermann, N., Muralt, P., Setter, N., Mathieu, H.J.

Publikováno v: In Applied Surface Science 2003 203:527-531

LOCAL GROWTH OF SOL-GEL FILMS BY MEANS OF MICROHOTPLATES.

Autor: Calame, F.¹, Baborowski, J.¹, Ledermann, N.¹, Muralt, P.¹

Publikováno v: International Journal of Computational Engineering Science. Sep2003, Vol. 4 Issue 3, p563-568. 6p. 12 Black and White Photographs, 2 Charts, 1 Graph.

Electrical coupling between sensors and actuators integrated in a micro active suspension

Autor: Thierry Verdot, Yann Meyer, Manuel Collet, Baborowski, J., Muralt, P.

Publikováno v: International Conference on Modal Analysis Noise and Vibration Engineering
International Conference on Modal Analysis Noise and Vibration Engineering, 2006, Leuven, Belgium. pp. 557-571
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Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::d9eaf9bb411d0f55c4e10f80a096e055
https://hal.archives-ouvertes.fr/hal-00179461

High aspect ratio, Large area silicon-based gratings for X-ray phase contrast imaging.

Autor: Baborowski, J., Revol, V., Kottler, C., Kaufmann, R., Niedermann, P., Cardot, F., Dommann, A., Neels, A., Despont, M.

Publikováno v: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS); 2014, p490-493, 4p