Zobrazeno 1 - 10
of 161
pro vyhledávání: '"B.W. Olson"'
Publikováno v:
Thin Solid Films. 441:180-186
Surface roughness, grain size and chemistry of Pt/Ti bottom electrodes have been investigated for their contribution to interfacial adhesion with PbZr 0.52 Ti 0.48 O 3 (PZT) thin films used in a microelectromechanical systems power-generating applica
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4859ff6c101cb33579bd1d3e3849cf5d
https://doi.org/10.1016/s0040-6090(03)00904-0
https://doi.org/10.1016/s0040-6090(03)00904-0
Publikováno v:
Journal of Materials Research. 18:2079-2086
Lead zirconate titanate (PZT) films between 1 and 3 μm thick were grown using solution deposition techniques to study the effects of crystal structure and orientation on the direct piezoelectric output of these films on platinized Si membranes. By v
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ed8d4825640e43c1a53a3a6c7c492496
https://doi.org/10.1557/jmr.2003.0292
https://doi.org/10.1557/jmr.2003.0292
Autor:
Suwara, Monika Iwona1 (AUTHOR) mbennet5@ed.ac.uk, Bennett, Matthew1,2 (AUTHOR) ivoto@mastgrp.com, Voto, Ilaria Anna Pia1 (AUTHOR) cbrownlie@mastgrp.com, Brownlie, Christopher Allan1 (AUTHOR) lgillies@mastgrp.com, Gillies, Elizabeth Ann1 (AUTHOR)
Publikováno v:
International Journal of Molecular Sciences. Sep2024, Vol. 25 Issue 18, p10067. 19p.
Publikováno v:
MRS Proceedings. 718
Thin films of lead zirconate titanate (PZT) are currently being used in a novel MEMS device to generate power. A piezoelectric stack consisting of platinum/PZT/gold is deposited by sputtering, spin coating, and subsequent heat treatments onto a thin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::72cd32931f380a6409aaf161395158cc
https://doi.org/10.1557/proc-718-d10.25
https://doi.org/10.1557/proc-718-d10.25
Publikováno v:
MRS Proceedings. 730
The P3 Micro Heat Engine relies on a thin film PZT based transducer to convert mechanical energy into usable electrical power. In an effort to increase process yield for these were used on sputtered Ti/Pt bottom electrodes to compare roughness, grain
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d7531ad212ed6064fdbacd360fe3c72
https://doi.org/10.1557/proc-730-v5.19
https://doi.org/10.1557/proc-730-v5.19
Autor:
L. M. R. Eakins, K.R. Bruce, Cecilia D. Richards, B.W. Olson, Robert F. Richards, David F. Bahr
Publikováno v:
MRS Proceedings. 687
A piezoelectric thin film MEMS device for generating power from a novel heat engine which approaches a Carnot cycle has been developed. The structure of the underlying electrode and PZT thin film generator has been optimized for increased adhesion. A
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::39ccff47bc05903ebe4692772d5e3727
https://doi.org/10.1557/proc-687-b4.3
https://doi.org/10.1557/proc-687-b4.3
Publikováno v:
MRS Proceedings. 666
Piezoelectric oxide films, such as lead zirconate titanate (PZT), are now being integrated into MEMS applications. Many PZT derived systems are deposited using a sol-gel process, which can be used in a microelectronics processing route using spin coa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::768d4e6eae56c2fd6357fe8fb3eeef66
https://doi.org/10.1557/proc-666-f6.1
https://doi.org/10.1557/proc-666-f6.1
Autor:
Wang, Li1 (AUTHOR) wangli19980722@163.com, Karikari, Benjamin2,3 (AUTHOR) benkarikari1@gmail.com, Zhang, Hu1 (AUTHOR) 2023801197@stu.njau.edu.cn, Zhang, Chunting1 (AUTHOR) 2018801229@njau.edu.cn, Wang, Zili1 (AUTHOR) sxli2024@163.com, Zhao, Tuanjie1 (AUTHOR) tjzhao@njau.edu.cn, Feng, Jianying1 (AUTHOR) tjzhao@njau.edu.cn
Publikováno v:
Agronomy. Mar2024, Vol. 14 Issue 3, p483. 20p.
Autor:
Bhatia, Shama1,2 (AUTHOR) shama.bhatia@mail.utoronto.ca, Bodenstein, David3 (AUTHOR) d.bodenstein@mail.utoronto.ca, Cheng, Ashley P.1,2 (AUTHOR) ashley.cheng@mail.utoronto.ca, Wells, Peter G.1,2,3 (AUTHOR) pg.wells@utoronto.ca
Publikováno v:
Cells (2073-4409). Sep2023, Vol. 12 Issue 18, p2308. 24p.
Autor:
Enck, Joshua R.1 (AUTHOR) enckj@upstate.edu, Olson, Eric C.1 (AUTHOR) olsone@upstate.edu
Publikováno v:
International Journal of Molecular Sciences. Aug2023, Vol. 24 Issue 16, p12965. 24p.