Zobrazeno 1 - 10
of 292
pro vyhledávání: '"B.H. Wu"'
Autor:
Y.T. Li, C. Z. Chen, Yongxiang Leng, Nan Huang, Q.Y. Deng, P.P. Jing, Y.L. Gong, B.H. Wu, D.L. Ma
Publikováno v:
Vacuum. 160:226-232
Owing to its high ionization degree, high power pulsed magnetron sputtering (HPPMS) has proven advantageous for Cu film growth. In this study, Cu films with different thicknesses deposited by HPPMS at different peak powers were prepared. Moreover, a
Akademický článek
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Akademický článek
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Autor:
Yongxiang Leng, C. Z. Chen, Hong Sun, Nan Huang, Y.T. Li, Jian Wu, Y.P. Wu, D.L. Ma, Dong Xie, B.H. Wu
Publikováno v:
Surface and Coatings Technology. 315:258-267
The drawbacks of titanium nitride (TiN) films deposited by high power pulsed magnetron sputtering (HPPMS) are low deposition rate (compared with conventional magnetron sputtering) and high residual stress. Many methods have been used to deal with the
Plasma characteristics and properties of Cu films prepared by high power pulsed magnetron sputtering
Publikováno v:
Vacuum. 135:93-100
Copper (Cu) has been proposed as a well-known material for metallization in Si-based semiconductor devices because of its low resistivity, high chemical stability, and excellent electromigration resistance. In order to improve the properties of Cu fi
Akademický článek
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Autor:
F.J. Jing, Y.P. Wu, Yongxiang Leng, T.F. Zhang, Y. Yu, Nan Huang, B.H. Wu, Sh.F. Zhu, F. Jiang
Publikováno v:
Surface and Coatings Technology. 292:54-62
For physical surface modification of a complex workpiece, the incoming particles are difficult to arrive at the inclined surface of the complex workpiece due to self-shadowing effect. This will result in the non-uniformity distribution of structure a
Autor:
Yi Wang, Hong Sun, Yan Ping Wu, Shengfa Zhu, F. Jiang, Yongxiang Leng, Y. Yu, B.H. Wu, F.J. Jing, Nan Huang
Publikováno v:
Surface and Coatings Technology. 281:27-34
Due to the large degree of ionization of the sputtered flux and high quality film fabrication, high power pulsed magnetron sputtering (HPPMS) is widely used. However, compared with DC sputtering, low deposition rate is probably the drawback of the HP
Autor:
Jin Liu, F. Jiang, Yongxiang Leng, B.H. Wu, Sh. Chen, Hong Sun, Shengfa Zhu, H.L. Sun, Nan Huang, B. Bai, Dong Xie
Publikováno v:
Surface and Coatings Technology. 252:8-14
In order to explore the potential application on cardiovascular stent, titanium oxide films were fabricated on CoCrMo alloy substrate by high power pulsed magnetron sputtering (HPPMS). The effect of Ti interlayer and thickness of Ti–O film on the f
Publikováno v:
Surface and Coatings Technology. 231:443-446
Among popular transparent conducting oxide (TCO) materials, indium tin oxide (ITO) and aluminum-doped zinc oxide (AZO) are expected to be the most applicable for the TCO layer of solar cells due to their resistance to a reductive ambient and their tr