Zobrazeno 1 - 10
of 13
pro vyhledávání: '"B.D. Eustergerling"'
Publikováno v:
Thin Solid Films. 519:4442-4446
Study of the tungsten filament alloying processes with different precursor molecules shows that silicidation occurs when using silacycobutane (SCB) and carburization with 1,1,3,3-tetramethyl-1,3-disilacyclobutane (TMDSCB). The difference in the decom
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::282409158697db867d4c64b685896dcf
https://doi.org/10.1016/j.tsf.2011.01.291
https://doi.org/10.1016/j.tsf.2011.01.291
Publikováno v:
Thin Solid Films. 516:506-510
The gas-phase reaction products of SiH 4 , NH 3 and their mixtures from a hot-wire CVD chamber were investigated using laser ionization time-of-flight mass spectrometry. Both vacuum ultraviolet laser single photon ionization and laser-induced electro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4828b979ab66abf2e71aae316df3f3a8
https://doi.org/10.1016/j.tsf.2007.06.029
https://doi.org/10.1016/j.tsf.2007.06.029
Publikováno v:
International Journal of Mass Spectrometry. 263:233-242
To understand the gas-phase chemistry in the processes of hot-wire chemical vapor deposition (HWCVD) with tetramethylsilane (TMS), the gas-phase products from the decomposition of TMS on a hot tungsten filament and the secondary gas-phase reactions i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3553b40c8bce677d65ce7b8e1fef7a6d
https://doi.org/10.1016/j.ijms.2007.02.051
https://doi.org/10.1016/j.ijms.2007.02.051
Publikováno v:
Physical chemistry chemical physics : PCCP. 10(18)
To study the effect of an Si–Si bond on gas-phase reaction chemistry in the hot-wire chemical vapor deposition (HWCVD) process with a single source alkylsilane molecule, soft ionization with a vacuum ultraviolet wavelength of 118 nm was used with t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bd3b2cac41a3a12127b1b2f41be85068
https://pubmed.ncbi.nlm.nih.gov/18446255
https://pubmed.ncbi.nlm.nih.gov/18446255
Publikováno v:
Journal of mass spectrometry : JMS. 42(5)
The gas-phase reaction products of silacyclobutane (SCB) and 1, 1-dideuterio-silacyclobutane (SCB-d(2)) from a hot-wire chemical vapor deposition (HWCVD) chamber were diagnosed in situ using vacuum ultraviolet (VUV) laser single-photon ionization (SP
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7e018a106294438ac18cfab510bfe25b
https://pubmed.ncbi.nlm.nih.gov/17285587
https://pubmed.ncbi.nlm.nih.gov/17285587
Publikováno v:
Journal of Analytical Atomic Spectrometry. 23:1590
A newly-developed laser induced electron impact ionization (LIEI) method is presented. In this method, electrons are generated by thermionic emission when directing a low-power, pulsed UV laser beam to a stainless steel rod exterior to the ion optics
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2242faee03c619a7c7942fc6182d38ec
https://doi.org/10.1039/b809597c
https://doi.org/10.1039/b809597c
Publikováno v:
Journal of the American Society for Mass Spectrometry. (11):1950-1958
The application of a laser-induced electron impact (LIEI) ionization source in studying the gas-phase chemistry of the SiH(4)/NH(3) hot-wire chemical vapor deposition (HWCVD) system has been investigated. The LIEI source is achieved by directing an u
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::37bb208736528958bd1b72620fd0c55d
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