Zobrazeno 1 - 3
of 3
pro vyhledávání: '"B. V. Yakshinskii"'
Autor:
Thomas B. Lucatorto, B. V. Yakshinskii, Theodore E. Madey, Shannon B. Hill, Nadir S. Faradzhev
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 74:28-32
In this paper we discuss surface phenomena leading to contamination of multilayer optics designed for Extreme Ultraviolet (EUV) lithography. Experimental data supported by calculations indicate dramatic influence of resonance structure of EUV mirror
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1c3b94f04202fcb42faed6a7893a43ce
https://doi.org/10.3103/s1062873810010089
https://doi.org/10.3103/s1062873810010089
Publikováno v:
Physical Review B. 54:R5271-R5274
We report the transmission of low-energy (10 eV) ${\mathrm{O}}^{+}$ ions through adsorbed alkali-metal (Li, Na, K, and Cs) overlayers on an oxidized tungsten substrate. We find that the ${\mathrm{O}}^{+}$ yield is attenuated by the alkali-metal overl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::318e55614ca6c64c5c1ea75d9008179b
https://doi.org/10.1103/physrevb.54.r5271
https://doi.org/10.1103/physrevb.54.r5271
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 101:69-72
Electron stimulated desorption (ESD) of neutral alkali metal atoms and positive ions has been studied from alkali metal layers adsorbed on oxidized and silicided tungsten by means of a static magnetic mass spectrometer combined with a retarding field
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8aa563fb689fc363c41769cf89c2090a
https://doi.org/10.1016/0168-583x(95)00286-3
https://doi.org/10.1016/0168-583x(95)00286-3