Zobrazeno 1 - 10
of 87
pro vyhledávání: '"B. Remaki"'
Autor:
Nouha Alcheikh, K. F. Schuster, B. Remaki, Jean-Marc Duchamp, C. Malhaire, Pascal Xavier, X. Mescot, C. Boucher
Publikováno v:
Microsystem Technologies. 21:301-307
Micro-electro-mechanical-system (MEMS) switches are very interesting for high frequency applications. These switches are electrostatically actuated micromechanical meanders-suspended bridges. In the field of millimeter wave radio astronomy, cryogenic
Publikováno v:
Key Engineering Materials. 543:208-211
The development of embedded systems and autonomous microsystems requires significant progress in the research of MEMS energy converters. Converting mechanical vibrations into electricity is an efficient way to collect environmental energy by using ME
Publikováno v:
physica status solidi c. 8:784-787
The analysis of anodic current-potential I-V characteristics of p-type silicon in concentrated hydrofluoric acid solution shows that the mechanism at the origin of porous silicon PS formation is determined by the charge exchange at the silicon surfac
Publikováno v:
physica status solidi (a). 204:1653-1657
Nanostructured porous silicon layers are studied for the purpose of their use as electrical insulators between mono-crystalline silicon substrates and integrated planar radio frequency (rf) devices. The capacitive nature of the layers with a tangent
Publikováno v:
physica status solidi c. 4:2098-2102
This paper deals with On-Chip-Electrophoresis separation systems micromachined on porous silicon. The electrical insulation properties of the porous substrates were analyzed and related to physical and chemical treatments such as thermal oxidation an
Autor:
Vladimir Lysenko, H. Artmann, C. Populaire, B. Remaki, D. Barbier, T. H. Pannek, Bernard Champagnon
Publikováno v:
physica status solidi (c). 2:3203-3207
Mechanisms of strain and stress appearing in as-prepared and treated meso-porous silicon nanostructures are described. Stress effects induced by nano-pores filling with ethanol and capping of the porous nanostructures are observed by micro-Raman spec
Publikováno v:
Applied Surface Science. 230:425-430
Hydrogen coverage of the specific surface of meso-porous silicon nanostructures is studied by means of attenuated total reflection infrared spectroscopy. A strong correlation of silicon hydride bonds and of total amount of the adsorbed hydrogen to th
Publikováno v:
Materials Science and Engineering: B. 101:313-317
We present a contribution dealing with the study of the barrier properties of meso-porous silicon (PS) with metals and p + -Si crystalline silicon. Metal/PS/p + -Si and p + -Si/PS/p + -Si structures with different thickness (1–10 μm) of PS are inv
Publikováno v:
Sensors and Actuators A: Physical. 99:13-24
Well-known for its promising luminescence properties, porous Si (PS) appeared also during last 5 years as a new thermal insulating material. Indeed, its extremely low thermal conductivity (TC) values (0.1–2 W m −1 K −1 ) allow to use PS for eff
Publikováno v:
Microelectronic Engineering. 88:1214-1216
We have studied the porous silicon (PS) formation dependence on the substrate doping concentration as a selective tool to form locally oxidized regions in silicon wafers. This approach could be used for electrical isolation in CMOS circuits as a prom