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pro vyhledávání: '"B. Nyrud"'
Publikováno v:
Advanced Microsystems for Automotive Applications 2001 ISBN: 9783642621246
The principle of the “ butterfly-gyro”, first demonstrated with large anisotropically etched structures in bulk silicon [1], has been adapted to SensoNor’s low cost manufacturing platform resulting in a small reliable component. Typical noise l
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fbe6842f6ca2f97c6fa2202933bda56f
https://doi.org/10.1007/978-3-642-18253-2_17
https://doi.org/10.1007/978-3-642-18253-2_17