Zobrazeno 1 - 10
of 32
pro vyhledávání: '"B. M. Ayupov"'
Publikováno v:
Applied Surface Science. 265:385-388
Silicon carbonitride films were obtained by PECVD method from hexamethyldisilazane at different deposition temperatures. Mechanical stresses in the films were studied by laser beam deflection method. It was found that the films deposited at low tempe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7573801a7e7e517148af90fbabcca504
https://doi.org/10.1016/j.apsusc.2012.11.017
https://doi.org/10.1016/j.apsusc.2012.11.017
Autor:
V. G. Kesler, A. N. Golubenko, Fedor A. Kuznetsov, B. M. Ayupov, N. I. Fainer, E. A. Maximovskii, Yu. M. Rumyantsev
Publikováno v:
Glass Physics and Chemistry. 39:77-88
Films of silicon carbonitride have been obtained by the plasma chemical decomposition of a gaseous mixture of helium and a volatile organic silicon compound 1,1,3,3-tetramethyldisilazane (TMDS) in the temperature range of 373–973 K. The modeling of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::89fb66cffee80bac1f0ec90c316f2f76
https://doi.org/10.1134/s1087659613010057
https://doi.org/10.1134/s1087659613010057
Publikováno v:
Russian Journal of Physical Chemistry A. 86:1716-1720
Films of SiC x N y H z composition are obtained by chemical deposition from the vapor phase via the activation of high-frequency discharge plasma (PECVD). The organosilicon compound hexamethyldisilazane, which contains all the atoms needed for the fo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::97b89fc44a33b653e8d655fb97563a5e
https://doi.org/10.1134/s0036024412110258
https://doi.org/10.1134/s0036024412110258
Publikováno v:
Optics and Spectroscopy. 112:201-205
The optical characteristics of nickel films deposited on Si(100) substrates by vacuum thermal evaporation have been studied. The thickness and optical constants of the films are determined using monochromatic zero ellipsometry, while the inverse prob
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c5089ef5b1eb5965aa0babdfd5e095d7
https://doi.org/10.1134/s0030400x1202004x
https://doi.org/10.1134/s0030400x1202004x
Autor:
B. M. Ayupov, Yu. M. Rumyantsev, N. I. Fainer, M. G. Voronkov, V. I. Rakhlin, V. G. Kesler, A. N. Golubenko
Publikováno v:
Glass Physics and Chemistry. 38:15-26
Silicon carbonitride layers have been obtained by chemical deposition from the gas phase with thermal (LPCVD) and plasma (PECVD) activation of the gas mixture of helium with the new volatile siliconorganic compound tris(diethylamino)silane (Et 2N)3Si
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0fa708379504adb158cc25c05c573374
https://doi.org/10.1134/s1087659612010051
https://doi.org/10.1134/s1087659612010051
Publikováno v:
Russian Journal of Inorganic Chemistry. 56:1216-1221
The subsolidus regions of the Li2MoO4-A 2 + MoO4-NiMoO4 (A+ = K, Rb, Cs) systems at 510°C have been triangulated by the intersecting-joins method. The A2MoO4-Li2Ni2(MoO4)3, Li2MoO4-A2Ni2(MoO4)3, A2Ni2(MoO4)3-Li2Ni2(MoO4)3 (A = K, Rb, Cs), and ALiMoO
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38bd17ed3819b037923888c59581c6cf
https://doi.org/10.1134/s0036023611080298
https://doi.org/10.1134/s0036023611080298
Publikováno v:
Glass Physics and Chemistry. 37:316-321
Synthetic process for nanocrystalline silicon carbonitride films was developed using plasma-chemical decomposition of a new organosilicon reagent, namely, trimethyl(phenylamino)silane Me3SiNHPh. Synthesis was carried out from the gaseous mixtures, su
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0ea4ebeed45179519de59738eea491bd
https://doi.org/10.1134/s1087659611030114
https://doi.org/10.1134/s1087659611030114
Autor:
E. A. Maksimovskii, V. R. Shayapov, Yu. M. Rumyantsev, B. M. Ayupov, Marina Kosinova, A. P. Smirnov
Publikováno v:
Inorganic Materials. 47:262-266
Boron carbonitride (BC x N y ) films of different compositions have been grown by low-pressure chemical vapor deposition using triethylamine borane as a single-source precursor and ammonia as an additional nitrogen source. Experiments were performed
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c2499ede5346a9899821fc6cbb83e5d0
https://doi.org/10.1134/s0020168511030204
https://doi.org/10.1134/s0020168511030204
Publikováno v:
Journal of Structural Chemistry. 51:179-185
Specific features of elemental composition analysis of silicon carbonitride thin films by energy dispersive spectroscopy (EDS) are considered. The films were preliminarily examined by IR spectroscopy, X-ray photoelectron spectroscopy (XPS), scanning
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09c7c9ce608d79cd19b3e20fc8259118
https://doi.org/10.1007/s10947-010-0210-0
https://doi.org/10.1007/s10947-010-0210-0
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 4:452-457
The approach to determination of the thickness and the refractive indices of dielectric films obtained in searching experiments is discussed. Experiments of this kind often exhibit unpredictable values of thickness and refractive indices of films. No
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::33a731ac4ba0a3b8a300f8d39233885f
https://doi.org/10.1134/s1027451010030158
https://doi.org/10.1134/s1027451010030158