Zobrazeno 1 - 10
of 17
pro vyhledávání: '"B. L. Peko"'
Autor:
J. N. DeFazio, B. L. Peko
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 22:2251-2255
Results are presented from an experimental study of electron capture and loss during collisions of low-energy hydrogen atoms and ions with a residual gas covered metal surface. Ground-state hydrogen atoms (H1s) and the atomic ions (H−,H+) were scat
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 201:453-459
Experimental results of atom-surface scattering are presented for variable energy (25–200 eV) collisions of hydrogen with a polycrystalline copper surface. Negative ion measurements are made for proton and hydrogen-atom beams impacting the surface.
Publikováno v:
Journal of Applied Physics. 92:1657-1662
Trifluoromethane (CHF3) is used in semiconductor plasma processing chambers to achieve high-etch selectivity of an oxide layer over a silicon substrate. Such surface etching is governed by the ion and molecule fluxes near the surface, the concentrati
Autor:
John W. Keller, M.-C. Fok, T. M. Stephen, J. M. Quinn, B. El Marji, S. A. Fuselier, Scott A. Boardsen, Dennis J. Chornay, Peter Wurz, Michael R. Collier, D. C. Hamilton, Barbara L. Giles, G. R. Wilson, A. G. Ghielmetti, K. W. Ogilvie, B. L. Peko, Thomas E. Moore, James L. Burch, Edmond C. Roelof
Publikováno v:
Scopus-Elsevier
We report observations of neutral atoms from the solar wind in the Earth's vicinity with the low-energy neutral atom (LENA) imager on the Imager for Magnetopause-to-Aurora Global Exploration (IMAGE) spacecraft. This instrument was designed to be capa
Publikováno v:
The Journal of Chemical Physics. 115:1765-1768
Insulating gas mixtures containing SF6 have been promoted to serve as replacements for pure SF6 in order to reduce SF6 atmospheric emission. It has been argued that some synergism may be achieved by choosing proper buffer gases in mixtures with SF6 s
Autor:
John W. Keller, B. L. Peko, K. W. Ogilvie, James L. Burch, Thomas E. Moore, J. M. Quinn, T. M. Stephen, Michael R. Collier, Peter Wurz, Barbara L. Giles, D. C. Hamilton, Dennis J. Chornay, Federico A. Herrero, G. R. Wilson, S. A. Fuselier, A. G. Ghielmetti
Publikováno v:
Geophysical Research Letters. 28:1143-1146
We report observations of low energy neutral atoms (LENA) from the solar wind and the ionosphere, obtained by the LENA Imager on the IMAGE spacecraft. The LENA Imager detects and images LENAs arriving at the spacecraft from within a 90° field of vie
Autor:
T.M Stephen, B. L. Peko
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 171:597-604
Measured absolute detection efficiencies are presented for H, H − and H n + ( n =1,2,3) impacting a commercially available, dual multichannel plate (MCP) electron multiplier at kinetic energies ranging from 30 to 1000 eV. Measurements involving iso
Autor:
B. L. Peko, T. M. Stephen
Publikováno v:
Review of Scientific Instruments. 71:1355-1359
Absolute detection efficiencies of a commercial multichannel plate detector have been measured for O, O+, and O−, impacting at normal incidence for energies ranging from 30–1000 eV. In addition, the detection efficiencies for O relative to its io
Publikováno v:
Physical Review E. 60:7449-7456
Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF(4)) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and disso
Publikováno v:
The Journal of Chemical Physics. 109:5269-5275
Measurements of total cross sections for collision induced dissociation, proton abstraction, and charge transfer have been made for collisions of CH4+ with CD4, H2, and Ar. The laboratory collision energies range from a few up to 400 eV, and isotopic