Zobrazeno 1 - 10
of 23
pro vyhledávání: '"B. Hoxhold"'
Autor:
Stephanus Büttgenbach, B. Hoxhold
Publikováno v:
Microsystem Technologies. 16:1609-1617
This paper presents a new batch process to fabricate thermally driven silicon micro grippers for handling and manipulation objects smaller than 25 μm. To achieve a robust gripper gearing with fine gripping tips, silicon on insulator (SOI) technology
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fdeb13bd59c926fbb1e3931c7ba27964
https://doi.org/10.1007/s00542-010-1040-x
https://doi.org/10.1007/s00542-010-1040-x
Autor:
Stephanus Büttgenbach, B. Hoxhold
Publikováno v:
Microsystem Technologies. 14:1917-1924
In this paper we present improvements in the field of batch fabricated micro grippers with shape memory alloy (SMA) actuators or pneumatic drives. In this context we illustrate two methods of structuring SMA foils. Moreover, it is shown how the proce
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7d8512775c0a63560a0cbd324eb58b99
https://doi.org/10.1007/s00542-008-0659-3
https://doi.org/10.1007/s00542-008-0659-3
Publikováno v:
Microsystem Technologies. 14:697-704
Three innovative micro actuator concepts on the basis of the differential SMA principle are presented in this paper: a high adaptive multi-actuator system, which is driven by numerous identical single actuators connected in parallel and in series, a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d5f4dc6d568edbb04b21553011275461
https://doi.org/10.1007/s00542-008-0600-9
https://doi.org/10.1007/s00542-008-0600-9
Autor:
M. Berndt, B. Hoxhold, Kerstin Schöttler, Juergen Hesselbach, Stephanus Büttgenbach, Rainer Tutsch
Publikováno v:
Microsystem Technologies. 12:665-669
Positioning accuracies in the range of a few micrometers and below are necessary for the assembly of active micro-systems. In order to reach these accuracies, an assembly system for sensor guided micro-assembly is developed in the Collaborative Resea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7af34fe84f06786444c7d7bf7e835e80
https://doi.org/10.1007/s00542-006-0088-0
https://doi.org/10.1007/s00542-006-0088-0
Autor:
Stefanie Demming, Anja Voigt, Andreu Llobera, S. de Pedro, A. Waldschik, Gabi Gruetzner, Victor J. Cadarso, B. Hoxhold, Stephanus Büttgenbach
Publikováno v:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
This paper presents the design, fabrication and characterization of all-optical polymer-based Micro-optoelectromechanical system (MOEMS) Variable Optical Attenuator (VOA). It consists of an SU-8 quad-beam structure and a suspended waveguide aligned t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::65f9632cf2a8c0ff4882b75b4a713a00
https://doi.org/10.1109/transducers.2013.6627048
https://doi.org/10.1109/transducers.2013.6627048
Autor:
S. Bütefisch, Annika Raatz, Stephanus Büttgenbach, Jan Wrege, Juergen Hesselbach, B. Hoxhold, Arne Burisch
Publikováno v:
Design and Manufacturing of Active Microsystems ISBN: 9783642129025
In the last several years many improvements of tools for handling and assembling of microparts (between 10 and 500 µm) have been made. This chapter will discuss the development and realization of electrostatic microgrippers and magazine structures a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4e0fda0c3f442dea9fcbaf0c6ecf743b
https://doi.org/10.1007/978-3-642-12903-2_16
https://doi.org/10.1007/978-3-642-12903-2_16
Autor:
Emmanuel Dore, S. Zaidi, Stephanus Biittgenbach, Philippe Pouille, Christine Prelle, B. Hoxhold, Frederic Lamarque
Publikováno v:
2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.
In this work, a bistable curved-beam is actuated between its two stable states using the force generated by optically controlled SMA elements. Two Shape Memory Alloy (SMA) elements are used for this purpose forming an antagonistic pair. Two laser sou
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::020e34dda0e748a823cd12bb07330304
https://doi.org/10.1109/aim.2010.5695867
https://doi.org/10.1109/aim.2010.5695867
Publikováno v:
SPIE Proceedings.
The shape memory effect is about to become more and more important as an innovative actuation principle in micro system technologies. Shape memory alloys (SMA) are able to return into a pre-memorized shape when heated. Due to this regeneration force
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d9499d04702cc83709fc0b935b395619
https://doi.org/10.1117/12.724192
https://doi.org/10.1117/12.724192
Publikováno v:
Microsystem Technologies; Apr2008, Vol. 14 Issue 4/5, p697-704, 8p
Publikováno v:
Microsystem Technologies; Jun2006, Vol. 12 Issue 7, p665-669, 5p