4-inch transparent plates based on thin-film AlN actuators for haptic applications

Autor: Skandar Basrour, J S Danel, F. Bernard, Thomas Sednaoui, Fabrice Casset, Cedrick Chappaz, Philippe Renaux, B. Desloges, S. Fanget

Publikováno v: Mechatronics
Mechatronics, 2016, 40, pp.264-269. ⟨10.1016/j.mechatronics.2016.05.014⟩
Mechatronics, Elsevier, 2016, 40, pp.264-269. ⟨10.1016/j.mechatronics.2016.05.014⟩

International audience; Numerous applications require tactile interfaces today. In particular, many customers’ applications such as automotive, Smartphone, tablet PC or touch pad can be concerned by high performances, low voltage haptic interfaces

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::166fe95713e0c7c6573282d1785705f2
https://doi.org/10.1016/j.mechatronics.2016.05.014

Micro-Photoacoustic Cell with Integrated Microphone for Sub-Ppm Gas Sensing

Autor: Jean-Guillaume Coutard, Frederic Souchon, Alexandre Teulle, B. Desloges, Jean-Marc Fedeli, Alain Glière, Helene Lhermet, Thierry Verdot, Maryse Fournier, Audrey Berthelot

Publikováno v: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

This paper demonstrates, for the first time, an on-chip integration of a photoacoustic (PA) detector, one of the main building blocks required for chemical sensing. This MEMS PA detector consists of a miniaturized PA cell within an acoustic transduce

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5835e525bff8f33bc484a8b68adadd8f
https://doi.org/10.1109/transducers.2019.8808295

Resonant Asymmetric Micro-Mirror Using Electro Active Polymer Actuators

Autor: Fabrice Casset, J S Danel, P. Poncet, S. Fanget, B. Desloges, F. Domingues Dos Santos

Publikováno v: 2018 IEEE SENSORS.

This paper presents a resonant asymmetric micro-mirror actuated using an Electro Active Polymer piezoelectric material. This element is a key component to develop optical sensor systems such as LIDAR. The working principle and the design of the micro

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c216207157c7af5bacb103ec199b4540
https://doi.org/10.1109/icsens.2018.8630286

PZT\ Actuated \MEMS\ Membrane Characterization and Post Simulation for Digital Loudspeaker Array Application

Autor: B. Laroche, Y. Bohard, Fabrice Casset, R. Morisson, J.P. Goglio, Quentin Leclere, S. Bouchet, B. Desloges, Stéphane Fanget

Publikováno v: Proceedings of Eurosensors 2016
Proceedings of Eurosensors 2016, 2016, Budapest, Hungary
HAL

International audience; A Digital Loudspeaker Array (DLA) is an electro-mechanical transductor which receives a numerical signal as input data and allows the analogical conversion directly in the air. We designed \PZT\ actuated membranes in order to

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fa0dd7e4b8f17593d2de3076e890fdc2
https://hal.science/hal-01468751

Design of thin-film AlN actuators for 4-inch transparent plates for haptic applications

Autor: S. Fanget, J S Danel, F. Bernard, Skandar Basrour, Cedrick Chappaz, B. Desloges, Fabrice Casset

Publikováno v: 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE'15)
16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE'15), Apr 2015, Budapest, Hungary. pp.1-4

International audience; Numerous applications require tactile interfaces today. In particular, many customers' applications such as Smartphone, tablet PC or touch pad can be concerned by high performances, low voltage haptic interfaces which allow th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c4da2242673a3a0962c205e43ca601ec
https://doi.org/10.1109/eurosime.2015.7103089