Zobrazeno 1 - 3
of 3
pro vyhledávání: '"B. A. Zakalov"'
Autor:
I. A. Kas’kov, M. N. Toropov, Nikolay I. Chkhalo, A. E. Pestov, Vladimir N. Polkovnikov, D. G. Volgunov, N. N. Salashchenko, S. Yu. Zuev, B. A. Zakalov, E. B. Kluenkov, I. G. Zabrodin, L. A. Suslov
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 75:49-52
An original stand for a nanolithographer-multiplicator with an operating wavelength of 13.5 nm and a design spatial resolution of 30 nm has been developed in Russia at the Institute for Physics of Microstructures, Russian Academy of Sciences. A detai
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8c4807e6585cd701376869c2b51ca0cd
https://doi.org/10.3103/s1062873811010278
https://doi.org/10.3103/s1062873811010278
Autor:
I. G. Zabrodin, Nikolay I. Chkhalo, N. N. Salashchenko, B. A. Zakalov, A. E. Pestov, I. A. Kas’kov
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 7:913-915
A device for the precise shape correction of optical surfaces of any irregular shape (convex, concave) up to 300 mm in diameter by means of ion-beam and reactive plasma etching is described. The possibilities of the device allow the fabrication of op
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::08bd55cfd5b922f840d77c7d258a7aad
https://doi.org/10.1134/s1027451013040216
https://doi.org/10.1134/s1027451013040216
Autor:
I. A. Kas’kov, L. A. Suslov, N. N. Salashchenko, I. G. Zabrodin, Vladimir N. Polkovnikov, E. B. Klyuenkov, S. D. Starikov, B. A. Zakalov
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 7:637-639
The paper describes a new apparatus for the magnetron and ion-beam synthesis of multilayer structures. The process parameters and operating conditions are presented, and the expected effects are discussed.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4a29c3971fa9cb258d94131711f752c7
https://doi.org/10.1134/s1027451013040204
https://doi.org/10.1134/s1027451013040204