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pro vyhledávání: '"Azadi Kenari, Shirin"'
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 767-770
STARTPAGE=767;ENDPAGE=770;TITLE=2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
STARTPAGE=767;ENDPAGE=770;TITLE=2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
We present a novel potentially gas-independent thermal flow sensor chip that contains three two-wire calorimetric flow sensors to measure the flow profile and flow direction inside a tube, and a single-wire flow-independent thermal conductivity senso
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6efcb233950a5171d3299af7ed190d21
https://doi.org/10.1109/mems49605.2023.10052491
https://doi.org/10.1109/mems49605.2023.10052491
Autor:
Azadi Kenari, Shirin, Wiegerink, Remco J., Veltkamp, Henk-Willem, Sanders, Remco G. P., Lötters, Joost C.
Publikováno v:
Micromachines; Jul2023, Vol. 14 Issue 7, p1280, 15p