Výsledky vyhledávání - "Ayuta Suzuki"

Impact of Electrostatic Effects on Wet Etching Phenomenon in Nanoscale Region

Autor: Ayuta Suzuki, Atsushi Okuyama, Takayuki Toshima, Kenji Nishi, Yoshiya Hagimoto, Hayato Iwamoto, Suguru Saito

Publikováno v: Solid State Phenomena. 219:115-118

The microminiaturization of semiconductor devices has made it necessary to control the wet etching process on the nanometer order. It is therefore extremely important to understand wet etching reactions in the nanoscale region of solid-liquid interfa

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ac7a48631381a7a7baa896607c1159e4
https://doi.org/10.4028/www.scientific.net/ssp.219.115

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Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors

Autor: Masaaki Matsukuma, Tsuyoshi Moriya, Munehito Kagaya, Ayuta Suzuki, Yamamoto Kosuke

Publikováno v: Journal of Vacuum Science & Technology A. 37:020920

In this study, a surface oxidation model for the plasma enhanced atomic layer deposition process for silicon oxide films formed by the combination of aminosilane with Ar/O2 plasma is proposed. After the discussion of the dominant oxidation pathways i

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0b20a2cf9bf9f2d20d0ff74b48ef0151
https://doi.org/10.1116/1.5078537

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Crystallization of Silicon Thin Films By Microwave-Induced Rapid Heating

Autor: Shunsuke Kimura, Kosuke Ota, Masahiko Hasumi, Ayuta Suzuki, Mitsuru Ushijima, Toshiyuki Sameshima

Publikováno v: ECS Meeting Abstracts. :2118-2118

1.Introduction Crystallization of amorphous silicon (a-Si) thin films is important for fabricating thin film transistor (TFTs) and thin film solar cells [1]. Rapid heating is an attractive method with low thermal budget for fabricating these devices

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::60074fd75fac99fe4b601dc96bfa37bc
https://doi.org/10.1149/ma2016-01/42/2118

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I123 A Molecular Dynamics Study on Molecular Scale Structure and Mass Transport Properties in the Vicinity of SiO_2-Water/IPA Interfaces

Autor: Shuichi Kosaka, Ayuta Suzuki, Gota Kikugawa, Taku Ohara, Takeo Nakano

Publikováno v: The Proceedings of the Thermal Engineering Conference. 2011:217-218

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::b0640a974d2726b47a8ed26a879d7c90
https://doi.org/10.1299/jsmeted.2011.217

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