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Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance
Publikováno v:
2016 International Conference on Optical MEMS and Nanophotonics (OMN).
This paper reports a stable electrostatic comb-driven scanner detecting electrostatic capacitance between the comb-shaped electrodes of mirror and the detecting electrodes, and feeding it back to the drive signals applied to the driving electrodes.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b946f0cb860318e73476c073bbf842c0
https://doi.org/10.1109/omn.2016.7565866
https://doi.org/10.1109/omn.2016.7565866
