Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Ayaka Suko"'
Autor:
Yuzo Shigesato, Yoshifumi Torigoshi, Junjun Jia, Emi Kawashima, Shin Ichi Nakamura, Ayaka Suko, Futoshi Utsuno
Publikováno v:
Applied Surface Science. 396:897-901
Indium-tin-zinc oxide (ITZO) films were deposited at various nitrogen flow ratios using magnetron sputtering. At a nitrogen flow ratio of 40%, the structure of ITZO film changed from amorphous, with a short-range-ordered In2O3 phase, to a c-axis orie
Publikováno v:
Physical Review Applied. 9
Amorphous indium gallium zinc oxide ($a$-IGZO) has drawn considerable interest as a channel material in flexible thin-film transistors (TFTs), to replace amorphous-Si-based TFTs, but $a$-IGZO-based TFTs show environment-dependent instability in thres
Autor:
Shin Ichi Nakamura, Koki Yano, Emi Kawashima, Ayaka Suko, Junjun Jia, Yuzo Shigesato, Futoshi Utsuno
Publikováno v:
Japanese Journal of Applied Physics. 55:035504
Amorphous indium–gallium–zinc oxide (a-IGZO) films were deposited by DC magnetron sputtering and post-annealed in air at 300–1000 °C for 1 h to investigate the crystallization behavior in detail. X-ray diffraction, electron beam diffraction, a
Autor:
Ayaka Suko, JunJun Jia, Shin-ichi Nakamura, Emi Kawashima, Futoshi Utsuno, Koki Yano, Yuzo Shigesato
Publikováno v:
Japanese Journal of Applied Physics; 2016, Vol. 55 Issue 3, p1-1, 1p