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Autor:
Khaydarov Zokirjon, Yuldashev Khurshid, Khaydarov Bunyodbek, Sultanov Shuxrat, Ergashov Qaxramon, Axmadjonov Mirzaolim
Publikováno v:
E3S Web of Conferences, Vol 587, p 01006 (2024)
Non-equilibrium processes in a gas discharge cell with semiconductor electrodes made of semi-insulating gallium arsenide and sulfur-doped silicon have been studied experimentally. It is shown that plasma contacts to semiconductor electrodes have a po
Externí odkaz:
https://doaj.org/article/f2d0e77051014253bf591db95cd310ca