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Autor:
Augustus Chee
Publikováno v:
2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT).
Compared to scanning electron microscope (SEM) dopant contrast where energy filtering is required, this paper reports for the first time strong contrast from donor distributions using the scanning helium ion microscope (SHIM) that can be used to map
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4dc23ed8388e76804192ff0ac1dd67c
https://doi.org/10.1109/icsict.2014.7021215
https://doi.org/10.1109/icsict.2014.7021215
