Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Atuko Yamaguchi"'
Autor:
Ioana Graur, Hitoshi Komuro, Yutaka Hojo, Derren N. Dunn, Marshal N. Miller, Atuko Yamaguchi, Keiichiro Hitomi, Toru Ishimoto, Shoji Hotta, Nicole Saulnier, Shunsuke Koshihara, Scott Halle, Nobuhiro Okai
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 15:034002
The model accuracy of optical proximity-effect correction (OPC) was investigated by two modeling methods for a 10-nm node process. The first method is to use contours of two-dimensional structures extracted from critical dimension-scanning electron m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1fbc877661149f00aa1a2c43a0e7acc1
https://doi.org/10.1117/1.jmm.15.3.034002
https://doi.org/10.1117/1.jmm.15.3.034002
Autor:
Keiichiro Hitomi, Halle, Scott, Miller, Marshal, Graur, Ioana, Saulnier, Nicole, Dunn, Derren, Nobuhiro Okai, Shoji Hotta, Atuko Yamaguchi, Hitoshi Komuro, Toru Ishimoto, Shunsuke Koshihara, Yutaka Hojo
Publikováno v:
Journal of Micro/Nanolithography, MEMS & MOEMS; Jul2016, Vol. 15 Issue 3, p034002-1-034002-8, 8p
Publikováno v:
Philosophical Magazine B. 60:137-152
Photoluminescence decay has been studied for five a-Si: H/a-Si3N4: H multilayer structures with different well-layer thicknesses of 8, 13, 25, 50 and 400 A and a common barrier-layer thickness of 100 A. The decay curves are compared with that observe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1b45922035d6a5557110df3fb7415dd9
https://doi.org/10.1080/13642818908228822
https://doi.org/10.1080/13642818908228822