Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Atsushi Yanagawa"'
Publikováno v:
ICM
This paper considers of an improvement of a settling time of the pneumatic servo stage in a vacuum environment. This pneumatic servo stage is widely recognized as the leading candidate for the Electron beam mask writing stage among the major company
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d6fd32efaa0156ee015425f0c4303a06
https://doi.org/10.1109/icmech.2019.8722906
https://doi.org/10.1109/icmech.2019.8722906
Publikováno v:
Journal of Japan Society of Civil Engineers, Ser. D3 (Infrastructure Planning and Management). 75:I_523-I_535
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e96464faa9d8198e48e736634d3127fc
https://doi.org/10.2208/jscejipm.75.6_i_523
https://doi.org/10.2208/jscejipm.75.6_i_523
Publikováno v:
Journal of Japan Society of Civil Engineers, Ser. D3 (Infrastructure Planning and Management). 75:I_351-I_368
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::719f70c81c31a3160d8fcf6f3264be11
https://doi.org/10.2208/jscejipm.75.6_i_351
https://doi.org/10.2208/jscejipm.75.6_i_351
Publikováno v:
Journal of Japan Society of Civil Engineers, Ser. D3 (Infrastructure Planning and Management). 75:I_375-I_386
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8f5d020c5a1e2a38b8e0c3b207635918
https://doi.org/10.2208/jscejipm.75.i_375
https://doi.org/10.2208/jscejipm.75.i_375