Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Atsushi Ohtomo"'
Autor:
Atsushi Ohtomo, Yasuharu Sasaki
Publikováno v:
Journal of Robotics and Mechatronics. 13:238-244
A pneumatic actuator outputs large power in proportion to weight and can be installed in an inexpensive, light and compact configuration. From the standpoint of controllability, however, it is weak due to nonlinearity by compression and delayed trans
Publikováno v:
IFAC Proceedings Volumes. 32:743-748
Robots utilized in the fields of welfare or agriculture should be light in weight and flexible in structure. A pneumatic actuator is considered as a candidate of actuators realizing such robots, because it is more powerful compared with a motor of th
Publikováno v:
Proceedings of 1994 VLSI Technology Symposium.
In sub-half micron CMOS, reduction of wiring capacitance is a key issue to improve the circuit performance because the ratio of wiring delay to total delay is increasing. In order to reduce the wiring capacitance, applying low dielectric materials to
Publikováno v:
Extended Abstracts of the 1995 International Conference on Solid State Devices and Materials.
Publikováno v:
Extended Abstracts of the 1993 International Conference on Solid State Devices and Materials.
Publikováno v:
Proceedings of thermal engineering conference. 2001:635-636
Publikováno v:
Japanese Journal of Applied Physics. 37:5843
A low dielectric fluorine-doped silicon oxide (SiOF) film, which was produced by adding C2F6 to the conventional chemical vapor deposited oxide, was applied to a 0.35 µm complementary metal oxide semiconductor (CMOS) and its influence on metal oxide
Autor:
Jiro Ida, Atsushi Ohtomo
Publikováno v:
Japanese Journal of Applied Physics. 37:1674
The TiSi2 local wiring technology has been newly characterized from the viewpoints of dopant interdiffusion and power reduction. It was found that only the p+/n junction degrades when TiSi2 local wiring connects the n+ layer and p+ layer. The results
Autor:
Izumi Aikawa, Akio Kita, Kiyotaka Yonekawa, Kazuhiko Kai, Kenji Nishi, Jiro Ida, Atsushi Ohtomo
Publikováno v:
Japanese Journal of Applied Physics. 33:475
It is concluded that in a shallow junction of post-junction silicide (PJS) scheme self-aligned silicide (SALICIDE) process, the decrease of impurity concentration at the TiSi2/Si interface significantly degrades performance of metal oxide semiconduct
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