Výsledky vyhledávání - "Atsushi Ogura, Atsushi Ogura"

Periodical

Defect Analysis in Bonded and H+Split Silicon-on-Insulator Wafers by Photoluminescence Spectroscopy and Transmission Electron Microscopy

Autor: Michio Tajima, Michio Tajima, Atsushi Ogura, Atsushi Ogura, Tomoki Karasawa, Tomoki Karasawa, Atsushi Mizoguchi, Atsushi Mizoguchi

Publikováno v: Japanese Journal of Applied Physics; October 1998, Vol. 37 Issue: 10 pL1199-L1199, 1p

Zobrazit plný text záznamu

Periodical

Control of Thickness Variation in Si-on-Insulator Bonded Wafers by Applying Voltage during KOH Etching

Autor: Atsushi Ogura, Atsushi Ogura

Publikováno v: Japanese Journal of Applied Physics; January 1996, Vol. 35 Issue: 1 pL71-L71, 1p

Zobrazit plný text záznamu

Periodical

Thinning of SOI Bonded Wafers by Applying Voltage during KOH Etching: Improvement of Thickness Variation by Reducing Leakage Current

Autor: Atsushi Ogura, Atsushi Ogura

Publikováno v: Japanese Journal of Applied Physics; March 1997, Vol. 36 Issue: 3 p1519-1519, 1p

Zobrazit plný text záznamu

Periodical

Precise Measurement of Strain Induced by Local Oxidation in Thin Silicon Layers of Silicon-on-Insulator Structures

Autor: Shigeru Kimura, Shigeru Kimura, Atsushi Ogura, Atsushi Ogura

Publikováno v: Japanese Journal of Applied Physics; March 1998, Vol. 37 Issue: 3 p1282-1282, 1p

Zobrazit plný text záznamu