Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Atanasova, Tanya"'
Autor:
Yang, Liu, Atanasova, Tanya, Radisic, Aleksandar, Deconinck, Johan, West, Alan C., Vereecken, Philippe
Publikováno v:
In Electrochimica Acta 1 August 2013 104:242-248
Autor:
Liu, Yang, Atanasova, Tanya, Radisic, Aleksandar, Deconinck, Johan, West, Alan, Vereecken, Philippe
The wafer scale plating uniformity with thin Cu seed layer was studied. Plating experiments were performed on 300 mm diameter wafers with 4 nm, 5 nm and 10 nm thin Cu seed layers. The plating current distribution can be very nonuniform due to the hig
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______3848::f4f7528e68207c7e40f90a844890c5b0
https://hdl.handle.net/20.500.14017/bfefcd7e-f7ef-431b-8b27-fefa0a32e29f
https://hdl.handle.net/20.500.14017/bfefcd7e-f7ef-431b-8b27-fefa0a32e29f
Autor:
Capecchi, Simone, Atanasova, Tanya, Willeke, Reiner, Parthenopoulos, Michael, Pizzetti, Christian, Daviot, Jerome
Publikováno v:
Diffusion and Defect Data Part B: Solid State Phenomena; September 2016, Vol. 255 Issue: 1 p291-296, 6p
Autor:
Atanasova, Tanya A., Carbonell, Laureen, Caluwaerts, Rudy, Tokei, Zsolt, Strubbe, Katrien, Vereecken, Philippe M.
Publikováno v:
ECS Transactions; May 2012, Vol. 41 Issue: 35 p83-97, 15p
Publikováno v:
ECS Transactions; April 2011, Vol. 33 Issue: 37 p13-26, 14p
Autor:
Armini, Silvia, Wilson, Chris J., Moussa, Alain, Franquet, Alexis, Vanstreels, Kris, Atanasova, Tanya, Radisic, Alex, Civale, Yann, Van, Annemie, El, Zaid, Bryce, George, Ruythooren, Wouter
Publikováno v:
ECS Transactions; October 2010, Vol. 28 Issue: 29 p77-87, 11p
Publikováno v:
ECS Transactions; February 2010, Vol. 25 Issue: 34 p67-78, 12p