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Autor:
Juan P. Espinós, Dietmar Leinen, Juan Carlos Sánchez-López, Leopoldo Contreras, V.M. Jiménez, Alfonso Caballero, Agustín R. González-Elipe, Asunción Fernádez
Publikováno v:
Scopus-Elsevier
Dietmar Leinen
Dietmar Leinen
The ion-beam-induced chemical vapor deposition method for the preparation of thin films consists of the bombardment of a suitable substrate with O or N ions of relatively high energy while a flow of an organometallic precursor is directed onto its su