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Autor:
Julien Bounouar, Arnaud Favre, Astrid Gettel, Ingo Stassen, Olivier Le-Barillec, Emmanuelle Veran, Thi Quynh Nguyen
Publikováno v:
Solid State Phenomena. 219:251-255
Airborne Molecular Contamination (AMC) concentrations become critical during queue-time (between two successive process steps) when wafers are degassing inside Front Opening Unified Pod (FOUP), a confined environment [1]. In that case, AMC concentrat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f573e497ef5ffcd29e451437334b922f
https://doi.org/10.4028/www.scientific.net/ssp.219.251
https://doi.org/10.4028/www.scientific.net/ssp.219.251
