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Autor:
Ali Ayachi Omar, Nail Faikovich Kashapov, Alexander Grigoryvich Luchkin, Asma Ayachi Amor, Abdelouahed Ayachi Amar
Publikováno v:
Results in Engineering, Vol 16, Iss , Pp 100696- (2022)
The temperature of the magnetron-sensitive components should be kept below the threshold limit during sputtering. Overheating over the Curie-temperature of the magnets can occur if the heat generated in the magnetron is not sufficiently dissipated, c
Externí odkaz:
https://doaj.org/article/529db7a48d434bf59fd1b04c15e86091