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pro vyhledávání: '"Ashwani K. Rawat"'
Autor:
Moinpour Mansour, Madison A. Smith, Ashwani K. Rawat, Colin T. Carver, Donald K. Schorr, Edward E. Remsen
Publikováno v:
ECS Transactions. 72:43-51
Fluorescence correlation spectroscopy (FCS) has been demonstrated as a versatile technique for the analysis of the smallest size fraction (diameter < 20 nm) of an abrasive silica particle dispersion and for small molecule adsorption on these particle
Publikováno v:
ECS Transactions. 52:489-494
Fluorescence correlation spectroscopy (FCS) is used to study additive-abrasive particle interactions in chemical-mechanical planarization (CMP) slurries. FCS provides quantitative determinations of the binding between additives and abrasive particles
Autor:
Colin T. Carver, Ashwani K. Rawat, Edward E. Remsen, Ashley E. Wayman, Mansour Moinpour, Daniel K. Turner
Publikováno v:
MRS Proceedings. 1560
Additive-abrasive interactions in chemical-mechanical planarization (CMP) slurries are investigated using fluorescence correlation spectroscopy (FCS). The FCS technique provides quantitative determinations of the interaction between additives and abr
Autor:
Ashwani K. Rawat, Mansour Moinpour, Abhinav Tripahi, Daniel K. Turner, Lauren M. Jacobson, Colin T. Carver, Edward E. Remsen
Publikováno v:
ECS Meeting Abstracts. :1435-1435
Recent studies have demonstrated that fluorescence correlation spectroscopy (FCS) can be used to analyze the adsorption of dissolved chemical compounds onto the dispersed abrasive particles in a CMP slurry (1, 2). The technique exploits competitive a