Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Arthur van de Nes"'
Publikováno v:
Microelectronic Engineering. 153:29-36
Calibration of the lateral scale of scanning probe microscopes using conventional physical calibration standards (i.e. 1D or 2D gratings) has limitations for small scanning ranges imposed by the pitch of the standards. Below approximately 1µm the nu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5dab3265aebcb90f0931a0dcfb3008b9
https://doi.org/10.1016/j.mee.2016.01.010
https://doi.org/10.1016/j.mee.2016.01.010
Publikováno v:
Microelectronic Engineering. 141:250-255
Display Omitted A simple surface profile for the areal surface texture parameter Sq was developed.The implementation of a virtual standard to generate the surface profile was demonstrated.Accurate calibration of the virtual standard was presented. As
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::949f0115471a4953577bad2f7d9e19db
https://doi.org/10.1016/j.mee.2015.04.021
https://doi.org/10.1016/j.mee.2015.04.021