Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Arthur Bernadac"'
Autor:
Ujwol Palanchoke, Gaby Bélot, Sébastien Bérard-Bergery, Juline Saugnier, Elodie Sungauer, Charlotte Beylier, Florian Tomaso, Marie-line Pourteau, Ivanie Mendes, Rémi Coquand, Arthur Bernadac
Publikováno v:
Novel Patterning Technologies 2023.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::35c6c9f32f097d0c3ef841c553a145b8
https://doi.org/10.1117/12.2657600
https://doi.org/10.1117/12.2657600
Process development of a maskless N40 via level for security application with multi-beam lithography
Autor:
Philippe Essomba, Gerard ten Berge, Marco Jan-Jaco Wieland, Philippe Brun, Jonathan Pradelles, Stefan Landis, Yoann Blancquaert, Patricia Pimenta-Barros, Isabelle Servin, Arthur Bernadac, Allan Germain
Publikováno v:
Novel Patterning Technologies 2018.
The maskless electron beam lithography system, based on massively parallel electron-beam writing strategy has the ability for low-cost production of truly unique individual chips in volume manufacturing, compatible with optical systems. Mapper Lithog
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5718e7b2cbc5d327fabbadbaf735d9cf
https://doi.org/10.1117/12.2297162
https://doi.org/10.1117/12.2297162