Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Artem Gabrelian"'
Publikováno v:
Materials & Design, Vol 244, Iss , Pp 113116- (2024)
One of the key advantages of Piezoelectric MEMS (PiezoMEMS) is its scalability, overcoming issues commonly associated with alternative transduction methods. However, the breadth and depth of studies on scaling the fabrication process from PiezoMEMS t
Externí odkaz:
https://doaj.org/article/c875545fcb3b42d182c6fef30f6cbf5d
Publikováno v:
Advanced Electronic Materials, Vol 9, Iss 12, Pp n/a-n/a (2023)
Externí odkaz:
https://doaj.org/article/4196082ef564491ca24abcb7c53ed3d1
Publikováno v:
Materials Today Communications. 33:104522
Devices based on piezoelectric actuation are some of the most promising among the microelectromechanical systems (MEMS). Commonly, piezoelectric materials, such as aluminum nitride (AlN), are utilized to perform out-of-the-plane motion due to a clear
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::14796d33068abd17e59a2bffbc7b09b8
https://doi.org/10.1016/j.mtcomm.2022.104522
https://doi.org/10.1016/j.mtcomm.2022.104522