Silicon Carbide Pressure Sensors for Harsh Environments

Autor: Guido Spinola Durante, Michel Despont, M.-A. Dubois, Rony Jose James, Olivier Dubochet, Arno Hoogerwerf

Publikováno v: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

The paper describes the fabrication of a silicon carbide piezoresistive pressure sensors intended for operating temperatures of up to 600°C. The different fabrication aspects, such as the metallization scheme, the etching of a 300μm deep cavity, an

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d69afdc237515c5850c5f41dc0072c96
https://doi.org/10.1109/transducers.2019.8808340

Fast tunable blazed MEMS grating for external cavity lasers

Autor: Maurizio Tormen, Arno Hoogerwerf, Ross Stanley, Philippe Niedermann, Herbert Shea

Publikováno v: International Conference on Space Optics — ICSO 2006.

Diffractive MEMS are interesting for a wide range of applications, including displays, scanners or switching elements. Their advantages are compactness, potentially high actuation speed and in the ability to deflect light at large angles. We have des

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7e930f6d03c0301c1df6bd503317b679
https://doi.org/10.1117/12.2308052

A mems-based gas chromatograph front-end for a miniature spectrometer

Autor: Andrew Morse, Arno Hoogerwerf, Ian Wright, Geraint Morgan, Simon Sheridan, Simeon Barber, Guido Spinola Durante

Publikováno v: 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).

A MEMS-based gas chromatograph (GC) front-end for a mass spectrometer has been developed for space applications. The GC uses Molecular Vapor Deposition (MVD) to achieve a uniform coating of the GC column. Particular attention has been paid to the flu

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::1cd0bd6a0c68afdce5038a7bb605838b
https://doi.org/10.1109/dtip.2017.7984483

Toward an Injectable Continuous Osmotic Glucose Sensor

Autor: Esko Strömmer, Olga Krushinitskaya, Kari Kautio, Christian Hinderling, Arno Hoogerwerf, Tor Inge Tønnessen, Bengt Akselsen, Tom Eirik Mollnes, Jaakko Lenkkeri, Häfliger Philipp, Andrey Sokolov, Henrik Jakobsen, Vasily Kondratyev, Even Zimmer, Erik A. Johannessen

Publikováno v: Johannessen, E, Krushinitskaya, O, Sokolov, A, Häfliger, P, Hoogerwerf, A, Hinderling, C, Kautio, K, Lenkkeri, J, Strömmer, E, Kondratyev, V, Tønnessen, T I, Mollnes, T E, Jakobsen, H, Zimmer, E & Akselsen, B 2010, ' Toward an injectable continuous osmotic glucose sensor ', Journal of diabetes science and technology, vol. 4, no. 4, pp. 882-892 . https://doi.org/10.1177/193229681000400417

Background: The growing pandemic of diabetes mellitus places a stringent social and economic burden on the society. A tight glycemic control circumvents the detrimental effects, but the prerogative is the development of new more effective tools capab

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::705028bddbec13b8c0336d6c677a043c
https://doi.org/10.1177/193229681000400417

High-efficiency MEMS tuneable gratings for external cavity lasers and microspectrometers

Autor: T. Overstolz, Maurizio Tormen, R.P. Stanley, Philippe Niedermann, R. Lockhart, Arno Hoogerwerf

Publikováno v: 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics.

Optical characterization of a second generation MEMS tuneable blazed grating with a 1times1 mm active area has demonstrated high-efficiency wavelength filtering with reflected outputs >90% and tuning over 25 nm in the near-infrared (NIR).

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::687c778c0f72d52d67f78706928889d1
https://doi.org/10.1109/omems.2008.4607814