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pro vyhledávání: '"Arnau Torrens"'
Autor:
Gerard Masmitjà, Pau Estarlich, Gema Lopez, Isidro Martín, Cristobal Voz, Marcel Placidi, Arnau Torrens, Edgardo Saucedo Silva, Pia Vasquez, Delfina Muñoz, Joaquim Puigdollers, Pablo Ortega
Publikováno v:
Journal of Science: Advanced Materials and Devices, Vol 9, Iss 2, Pp 100698- (2024)
This work highlights the impact of growth temperature on the electrical and optical properties of Al-doped ZnO (AZO) films deposited by the atomic layer deposition (ALD) technique. The ALD process and super-cycle sequence have been optimized, identif
Externí odkaz:
https://doaj.org/article/a1b026867221443b9520db73225a017f