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pro vyhledávání: '"Armin Dr Ing Leitel"'
Autor:
Volkmar Giggel, Armin Dr Ing Leitel
Publikováno v:
SPIE Proceedings.
For high-resolution optical imaging systems used in photolithography, lenses with diameters up to 200 mm and surface accuracies of about 25 nm are required. To realize an economic production of such elements, a computer-controlled polishing following
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0113694b983f6875a346fe01f39a1e7
https://doi.org/10.1117/12.57739
https://doi.org/10.1117/12.57739
